CobaltMaghrebV1, Main, Exploration, bibRecord, 000637

Inter-diffusion of cobalt and silicon through an ultra thin aluminum oxide layer

Identifieur interne : 000637 ( Main/Exploration ); précédent : 000636; suivant : 000638

Inter-diffusion of cobalt and silicon through an ultra thin aluminum oxide layer

Auteurs : T. El Asri [Maroc] ; M. Raissi [France] ; S. Vizzini [France] ; A. El Maachi [Maroc] ; E. L. Ameziane [Maroc] ; F. Arnaud D'Avitaya [France] ; J.-L. Lazzari [France] ; C. Coudreau [France] ; H. Oughaddou [France] ; B. Aufray [France] ; A. Kaddouri [Maroc]

Source :

Applied surface science [ 0169-4332 ] ; 2010.

RBID : Pascal:10-0480881

Descripteurs français

Pascal (Inist)
- Diffusion mutuelle, Cobalt, Métal transition, Silicium, Couche mince, Aluminium, Diffusion(transport), Structure MIS, Spectrométrie Auger, Microscopie électronique transmission, Co, Si, Al.
Wicri :
- topic : Cobalt, Aluminium.

English descriptors

KwdEn :
- AES, Aluminium, Cobalt, Diffusion, Interdiffusion, MIS structures, Silicon, Thin films, Transition elements, Transmission electron microscopy.

Abstract

Optical emission spectroscopy of sputtered species during ion bombardment, Auger electron spectroscopy and high-resolution transmission electron microscopy were used to study the cobalt and silicon diffusion through the interfaces of Co/AlO/Si(0 0 1) hetero-structure. The results are discussed as a function of the annealing temperature of sample and show that the diffusion process at the interfaces starts for annealing temperatures above 200 °C without detectable modification of the oxide layer.

Affiliations:

Links toward previous steps (curation, corpus...)

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to stream PascalFrancis, to step Curation: 000216
to stream PascalFrancis, to step Checkpoint: 000089
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Le document en format XML

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<series><title level="j" type="main">Applied surface science</title>
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<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>AES</term>
<term>Aluminium</term>
<term>Cobalt</term>
<term>Diffusion</term>
<term>Interdiffusion</term>
<term>MIS structures</term>
<term>Silicon</term>
<term>Thin films</term>
<term>Transition elements</term>
<term>Transmission electron microscopy</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Diffusion mutuelle</term>
<term>Cobalt</term>
<term>Métal transition</term>
<term>Silicium</term>
<term>Couche mince</term>
<term>Aluminium</term>
<term>Diffusion(transport)</term>
<term>Structure MIS</term>
<term>Spectrométrie Auger</term>
<term>Microscopie électronique transmission</term>
<term>Co</term>
<term>Si</term>
<term>Al</term>
</keywords>
<keywords scheme="Wicri" type="topic" xml:lang="fr"><term>Cobalt</term>
<term>Aluminium</term>
</keywords>
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<front><div type="abstract" xml:lang="en">Optical emission spectroscopy of sputtered species during ion bombardment, Auger electron spectroscopy and high-resolution transmission electron microscopy were used to study the cobalt and silicon diffusion through the interfaces of Co/AlO/Si(0 0 1) hetero-structure. The results are discussed as a function of the annealing temperature of sample and show that the diffusion process at the interfaces starts for annealing temperatures above 200 °C without detectable modification of the oxide layer.</div>
</front>
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	Serveur d'exploration sur le cobalt au Maghreb
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Serveur d'exploration sur le cobalt au Maghreb

Inter-diffusion of cobalt and silicon through an ultra thin aluminum oxide layer

Inter-diffusion of cobalt and silicon through an ultra thin aluminum oxide layer

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